Parker PS Mega Membrane

Parker – PS Mega-Pure Filter membranes

Mega-Pure polyethersulfone membrane cartridges provide superior flow rates over the competition.
The unique construction features a high-surface area design that allows for excellent flow rates and high particle removal efficiency.
Hydrophilic polyethersulfone membrane cartridges require no prewetting and are ready to use.
The Mega-Pure Polyethersulfone Membrane Series of filter cartridges meets or exceeds requirements for the filtration of UHP liquids used in the fabrication of state-of-the-art microelectronic devices.

Benefits and Features

• High surface area design provides excellent flow rates and extended filter life while maintaining high particle removal efficiency.
• Rinsed to 18 megohm-cm resistivity with UHP water.
• Spunbonded polypropylene support materials eliminate sites for potential shedding and increased particle counts.
• Provides broad chemical compatibility.

Typical Applications

             UHP Water

• Central PAD
• Polishing
• Stations
• Point-of-Use

  UHP Chemical

• Specialty Chemicals
• Point-of-Use
• Bulk Photoresists and Solvents

  Microelectronics

• Semiconductor
• Optical Disks
• Printed Circuits
• Hard Disks