Cuno LifeASSURE PSN Capsules

3M LifeASSURE PSN Series Capsule Filter

LifeASSURE PSN Nylon fi lter cartridges and capsules, formerly known as PhotoSHIELD, are highly retentive membrane fi lter elements designed to meet the exacting requirements of photoresist and ancillary chemical applications.

The naturally hydrophilic Nylon 6,6 pleated membrane in an all high density polyethylene (HDPE) cartridge or an all polypropylene capsule construction, provides increased fi lter life and superior removal of gel and hard particles when compared to other membrane cartridges or capsules.

Features and Benefits

  • Provides both lower operating and differential pressure to minimise outgassing and microbubble formation
  • A lower pressure drop increases the rate of recirculation which allows particle counts to be achieved
  • more rapidly while reducing energy and wear on the pumps
  • Increased throughput and fi lter lifetime which lowers cost-of-ownership
  • Superior removal of gel particles for reduced defectivity
  • Reduces downtime and increases overall equipment effectiveness (OEE)
  • Economic alternative to UPE and PTFE
  • Low Extractables

Operation Conditions

  • Maximum operating Temperature 50°C (122°F)
  • Maximum differential Pressure 4.1 bar (59 psi)

Typical Applications

  • 157 nm Photoresists
  • 193 nm Photoresists
  • 248 nm Photoresists
  • I line Photoresists
  • G line Photoresists
  • Alcohols
  • Bases
  • Developers
  • Etchants / Strippers
  • Solvents

 

Data may be subject to change without any further notice.

 

 

Please contact us for more information and/or a quotation request.

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