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Semiconductor

Ultrapure water (UPW) for semiconductor industry

In the production of plasma displays, chips and integrated circuits, water of very high quality is necessary for certain process steps.

Typical scheme of a UPW production system

UPW production requires an integration of several treatment technologies including reverse osmosis, electro-deionization and ion exchange.

A well designed UPW system requires a strategic selection of technologies and equipment. Depending on the feed water quality and/or the user requirements, different configurations can be applied.Please contact us for more information.

UPW quality guidelines

The ASTM (American Society for Testing and Materials) differentiate several gradations of purity for the semiconductor industry

Parameter

Type E.1

Type E 1.1

Type E 1.2

Linewidth

1.0-0.5

0.35-0.25

0.18-0.09

Resistivity, 25oC

MΩ.cm

18.1

18.2

18.2

TOC (μg/L) (on-line for

5

2

1

On-line dissolved oxygen (μg/L)

25

10

3

On-Line Residue after evaporation (μg/L)

1

0.5

0.1

SEM particles

 

 

 

0.1-0.2 µm

1.000

700

<250

0.2-0.5 µm

500

400

<100

0.5-0.1 µm

100

50

<30

10 µm

<50

<30

<10

Bacteria in CFU/Volume

 

 

 

100 mL Sample

5

3

1

1L Sample

 

 

10

10L Sample

 

 

 

Silica

 

 

 

Total (μg/L)

5

3

1

Dissolved (μg/L)

3

1

0.5

Anions and Ammonium by IC (μg/L)

 

 

 

Ammonium

0.1

0.1

0.05

Bromide

0.1

0.05

0.02

Chloride

0.1

0.05

0.02

Fluoride

0.1

0.05

0.03

Nitrate

0.1

0.05

0.02

Nitrite

0.1

0.05

0.02

Phosphate

0.1

0.05

0.02

Sulfate

0.1

0.05

0.02

Metals by ICP/MS (μg/L)

 

 

 

Aluminum

0.05

0.02

0.005

Antimony

 

 

 

Arsenic

 

 

 

Barium

0.05

0.02

0.01

Boron

0.3

0.1

0.05

Cadmium

 

 

 

Calcium

0.05

0.02

0.002

Chromium

0.05

0.02

0.002

Copper

0.05

0.02

0.002

Iron

0.05

0.02

0.002

Lead

0.05

0.02

0.005

Lithium

0.05

0.02

0.003

Magnesium

0.05

0.02

0.002

Manganese

0.05

0.02

0.002

Nickel

0.05

0.02

0.002

Potassium

0.05

0.02

0.005

Sodium

0.05

0.02

0.005

Strontium

0.05

0.02

0.001

Tin

 

 

 

Titanium

 

 

 

Vanadium

 

 

 

Zinc

0.05

0.02

0.002

Note: The values in this table are guidelines provided by ASTM. The guidelines will be revised whenever the semiconductor industry develops new linewidths Please consult ASTM website (www.astm.org) for updates on these values.

The requirements of high-end use are classified in type E-1.1 and type E-1.2.

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